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PRECISION ALIGNMENT STATION
Available for all
situations where precision alignment of substrate to mask, mask
to mask or substrate to substrate is needed. The interchangeable
vacuum mask holders take parts up to 17". Interchangeable
vacuum chucks for substrates up to 16" square, .3"
thick. Fixed level and planarizing configurations, fixed or
removable substrate pre-alignment.
Chuck motions are
micrometer driven X, Y and Theta with precision Z adjustment for
fine gap settings. There is also a differential micrometer option
with coarse/fine motion.
The control panel
features pneumatic controls for on/off of the substrate &
mask vacuum. Adjustable contact & ball lock vacuum for
planarizing chucks, adjustable N2 purge and mask frame up/down
controls.
 
18/01/2012 03:50
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