Available for all situations
where precision alignment of substrate to mask, mask to mask or substrate to
substrate is needed. The interchangeable vacuum mask holders take parts up to
17". Interchangeable vacuum chucks for substrates up to 16" square,
.3" thick. Fixed level and planarizing configurations, fixed or removable
substrate pre-alignment.
Chuck motions are micrometer
driven X, Y and Theta with precision Z adjustment for fine gap settings.
There is also a differential micrometer option with coarse/fine motion.
The control panel features
pneumatic controls for on/off of the substrate & mask vacuum. Adjustable
contact & ball lock vacuum for planarizing chucks, adjustable N2 purge
and mask frame up/down controls.
