MEMS - MST Equipment
MEMS or Microelectromechanical systems is the name given to technology of very small devices; it merges at the nano-scale into nanotechnology and nanoelectromechanical systems (NEMS). MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe).
The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes.
We offer both UV exposure systems for creating patterning, and dry etch machining systems to create the etch process. We have also equipped several complete packaged systems including laminators, developers, ultrasonic cleaners, the exposure resist film and drying ovens to create a complete system.
PRODUCTION EQUIPMENT FOR MANUFACTURING MEMS & MST:
We can also advise and supply Turnkey MST and MEMS Production systems including laminators, ultrasonic baths, developers, and drying ovens as a complete package depending on your needs. Call us for further information or details on how we can help.
DRY ETCH BLASTERS
DRY ETCH SURFACE ABRADER SYSTEM
DRY ETCH ABRASIVE POWDER
DRY ETCH DUST COLLECTORS
UV EXPOSURE SYSTEMS