MEMS - MST Equipment
MEMS or Microelectromechanical systems is the name given to technology of very small devices; it merges at the nano-scale into nanotechnology and nanoelectromechanical systems (NEMS). MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe).
The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes.
We offer both UV exposure systems for creating patterning, and dry etch machining systems to create the etch process. We have also equipped several complete packaged systems including laminators, developers, ultrasonic cleaners, the exposure resist film and drying ovens to create a complete system.
PRODUCTION EQUIPMENT FOR MANUFACTURING MEMS & MST:
 DRY ETCH BLASTERS
 DRY ETCH SURFACE ABRADER SYSTEM
 DRY ETCH ABRASIVE POWDER
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 DRY ETCH DUST COLLECTORS
 UV EXPOSURE SYSTEMS
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