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UV Exposure System

Available from ABM Inc in the USA is their UV Exposure System. The stand alone UV exposure system is capable of near UV (350-450nm), mid UV (280-310nm) and deep UV (220-280nm).

Mirror Sets available are: Near UV, G, H, & I line (436nm, 400nm, 365nm), Mid UV (280-310nm), Deep UV (220nm), (248nm), (254nm), (260-280nm)
Uniform/Collimated Exposure Beams Up to 16" Square
Uniform/Non-Collimated Exposure Beams Up to 18" Square
2-Channel 200 to 2,000 Watt Intensity Controlling Power Supplies
Adjustable Wattage (regulated) 200 to 2,000 Watt Power Supplies
Exposure Timer, Adjustable .1 To 999.9 Seconds, Minute Timers Available
Table-Top Mounting With Light Shielding, Rotating Chuck Options
Double Sided Exposure Console For Simultaneous (front/back) Or Independent (front or backside) Exposures. Console Supports, 2-Exposure Sources, 2-Lamp Power Supplies & 2-Shutter Timers.
Quick Change Mirror Mounting

Description of Standard UV Lightsource System (350nm-450nm)

This UV lightsource produces an intense, uniform, collimated beam of ultraviolet energy. Radiation from high-pressure mercury arc lamps is collected by a reflector and directed to a 45 degree mirror, optic integrator (fly’s eye lens), then reflected toward the 2nd 45 degree mirror and to the exposure area after passing through the collimating lens.

Description of Deep UV (200nm-280nm) & Mid UV (280nm-310nm) Lightsources

Deep UV (220-280nm) and Mid-UV (280-310nm) Lightsource Systems differ from the standard system in three (3) ways.

1. The optics are designed for high reflection and transmission at shorter wavelengths. The mirrors are tuned to the wavelength spectral regions desired. All transmitting optics (optical integrator and collimating lens) are made of high transmission (low absorption) quartz materials.

2. The lamp used can be either mercury (Hg), Xenon (Xe), Mercury-Xenon (Hg-He), or Mercury Xenon Plus (Hg-Xe). The selection depends on the wavelength and level of radiation desired. The (Hg) type lamps are anode (+) down while the Xe types are anode (+) up. In all cases, the gold band on the envelope should be down.

3. The electrical system is different for Hg and Xe type lamps. The anode (+) and cathode (-) sides are reversed with Hg and Hg-Xe lamps.

Power Supplies

Different power supplies must be used as Hg lamps are higher voltage, lower current, while the Xe lamps operate at a significantly higher current. (Example: the 500W Hg lamp has 65-70 Volts @ 7.7-7.1 Amps while the 500W Xg lamp has 31-36 Volts @ 14-16 Amps).

The ABM Model 150 UV Meter also available for measuring uv lamp output levels.

a. LCD Display
b. Interchangeable, calibrated spectral probes
c. Operates on 9-volt transistor battery with typical life greater than 150 hours
d. Intensity scales: 2W/cm² (2,000 mW/cm²) or 200mW/cm².
4. Specifications
NIST Traceability Better than ±3%
Repeatability Better than ±1%
Accuracy Electrical ±1%; Linearity ±0.1%; Optical
Calibration ±5% absolute; ±1% relative
Intensity Scales Channel A: 20mW/cm² and 200mW/cm²
Channel B: 20mW/cm² and 200mW/cm²
Circuitry Solid State CMOS integrated circuitry
Display Liquid Crystal 3.5 digit for intensity values, Low battery
Spectral Responses Standard Probe (dual channel) Channel A=365nm, Channel B=400nm
Optional Probes Available in Deep UV (220,248,254,260nm), Mid UV (280 and 310nm), UV (365, 400 & 436nm)
Power Requirements One standard 9V transistor battery
Dimensions 6.0" L, 2.75" W, 1.1" D
Weight 11.5 ounces

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ABM UV Exposure System
ABM Model 150 UV Meter


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UV Meter

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ABM Model 150 Datasheet
UV Exposure System
Small Area Spot Cure Gun
UV Cure Chambers
Mask & Substrate Alignment
UV Measurement Radiometers
UV Measurement Labels
UV Fastcheck Strips
UV Equipment, Spares & Measurement